Schottky Field Emission Scanning Electron Microscope boosts resolution and operability

August 05, 2019 //By Nick Flaherty
JEOL in Tokyo has launched a scanning electron microscope (SEM) using a Schottky electron gun to get a resolution of 0.9nm at 20kV.
JEOL in Tokyo has launched a scanning electron microscope (SEM) using a Schottky electron gun to get a resolution of 0.9nm at 20kV.

The JSM-F100 SEM incorporates an In-lens Schottky Plus FE electron gun and a new electron optical control system as well as a Live Image Visual Enhancer-Artificial Intelligence filter. This enables an optimal combination of high-spatial-resolution imaging and operability. A standard JEOL energy dispersive X-ray spectrometer (EDS) is fully integrated within the tool for acquisition from images to elemental analysis results. The JSM-F100 achieves a work efficiency 50% or higher than the previous JSM-7000 series.

An SEM used in semiconductor and material test flows need fast high-quality data acquisition and simple compositional information confirmation with seamless operation.

The In-lens Schottky Plus FE electron gun is combined with a low-aberration condenser lens to give higher brightness. Probe current of a few pA to 300 nA at 30 kV and 100 nA at 5 kV supports high-resolution imaging and high-speed elemental mapping. A Hybrid Lens combines electrostatic and magnetic field lens, supports high-spatial-resolution imaging and analysis of various specimens.

The AI filter is used to provide a higher quality of live images. Unlike image integration processing, this new filter displays a seamless moving live image with no residual image and is very effective for quickly searching observation areas, focusing, and stigmator adjustment. A "Zeromag" option provides seamless transition from optical to SEM imaging, makes it easy to locate the target specimen area.

The resolution at 1kV is 1.3nm, increasing to 0.9nm at 20kV, with an accelerating voltage of 0.01 to 30 kV. The energy resolution up to 133 eV works with elements from Boron to Uranium over a detection area of 60 mm 2. The company plans to make 60 SEM units a year.

www.jeol.com


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